Applications from Schunk Xycarb Technology.

Suitable products for your application


RTP Rings
RTP Lamps


Schunk Xycarb Technology is your global supplier of integrated packages for quartz, graphite, ceramic products and related services, including lamps.
Schunk Xycarb Technology’s EPI and RTP lamps outperform competitor lamps both in test environment and in customer’s equipment
Schunk Xycarb Technology’s lamps (both EPI and RTP) are supplied around the world to major wafer and device houses in the semiconductor industry

Lamps portfolio

Schunk Xycarb Technology’s lamps outperform competitor lamps in test environments
Schunk Xycarb Technology's lamps are qualified and have realized better lifetime with major semiconductor customers around the world
Favorable value for money qualities
EPI

2kW Lamp for AMAT Centura (All wafer sizes)
6kW Lamp for ASM Epsilon (≤ 8” wafers) 
1kW Lamp Ceramic Base for ASM Epsilon 
6kW Lamp for AMAT Barrel systems (Batch EPI)

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