Applications from Schunk Xycarb Technology
Suitable products for your application
Epitaxy
Enhanced designs increasing your yields
Optimizing parts for longer life time
Supporting your projects reducing Cost of Ownership
Total Repair Service for quartz chamber parts
Available for your sites, in all parts of the world at our Standard Global Specifications, ready for your Global Finger Printing programs
Parts for the entire Process Chamber
SiC Graphite, Lamps and Quartz made available in easy ways for you to do business.
We offer Consignment Programs and our Special Packaging saves time in your Installation Process
Applications
Schunk Xycarb Technology provices integrated solutions for the complete EPI chamber.
Turn key Solution
EPI layer profile repeatability solutions by thermally tuned parts
Total care
Total Care comprises customer-specific repair service programs, benefitting the customer by allowing Schunk Xycarb Technology to manage the overall tasks related to EPI quartz cleaning and repairing.
CoO reduction
Quartz repair and refurbishment service has reduced CoO of Quartz parts by 50%.