Applications from Schunk Xycarb Technology

Suitable products for your application

MOCVD
Epitaxy ETCH CVD/PVD RTP Mono wafers FBR Technology Siemens process

Enhanced designs increasing your yields
Optimizing parts for longer life time
Supporting your projects reducing Cost of Ownership
Total Repair Service for quartz chamber parts

Available for your sites, in all parts of the world at our Standard Global Specifications, ready for your Global Finger Printing programs
Parts for the entire Process Chamber

SiC Graphite, Lamps and Quartz made available in easy ways for you to do business.
We offer Consignment Programs and our Special Packaging saves time in your Installation Process

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Applications

Schunk Xycarb Technology provices integrated solutions for the complete EPI chamber.

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Turn key Solution

EPI layer profile repeatability solutions by thermally tuned parts.

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Total care

Total Care comprises customer-specific repair service programs, benefitting the customer by allowing Schunk Xycarb Technology to manage the overall tasks related to EPI quartz cleaning and repairing.

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CoO reduction

Quartz repair and refurbishment service has reduced CoO of Quartz parts by 50%.

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