Applications from Schunk Xycarb Technology

ETCH

Targeted solutions reducing your Cost of Ownership (CoO)

Critical consumable parts

Insert rings, Focus Rings and Hot Edge Rings
Chamber Confinement Rings
Gas Distribution Plates
Electro Static Chucks (under development)
Broad scope of Material Offerings

Quartz
Silicon
Aluminium Oxide
Aluminium Nitride
Silicon Carbide
Sapphire