Applications from Schunk Xycarb Technology

Suitable products for your application

MOCVD Epitaxy ETCH CVD/PVD
RTP
Mono wafers FBR Technology Siemens process

Edge Ring and Wafer Support Cylinder for RTP Equipment, RTP Lamps

Infrared Lamps for EPI and RTP applications, RTP, 8” RTP: AMAT Centura XE & Radiance

Edge Ring, Edge Ring flat type wafer, Adapter Ring (6”), Edge Ring thin, Wafer Support Cylinder,
12” RTP: AMAT Radiance (+)

RTP RadiancePlus chamber (Vantage), Edge ring uni oxidized, Wafer support cylinder, ATM quartz disk (RE needed), 12” RTP: AMAT Radiance (+)

RTP Radiance chamber (Centura), Edge ring silicon coated, Wafer Support Cylinder, ATM quartz disk


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RTP Rings

Full range of CVD SIC, Quartz and Lamps for tools by AMAT and Levitech (ASM spin off) 

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RTP Lamps

Schunk Xycarb Technology is your global supplier of integrated packages for quartz, graphite, ceramic products and related services, including lamps. 

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